Menu of Heat Beam Technology Demonstration

- HB Thin Film Deposition
- HB Annealing
- HB Superheated Steam Reformation

If you are interested in demonstration of Heat Beam capabilities for your particular needs and conditions, please contact us

HB-CVD : No Need to Heat the Substrate Materials

1. Opens the possibility to apply to diverse substrate material types and shapes

- Silicon wafers、glass and other ceramic materials,
plastic substrates and films - containers, nuts and bolts, complex structures


2. Can handle demonstration substrate size up to 30cm x 30 cm
(continuous film coating demo may be possible upon request)

3. Options for the thin film materials include,
but not limited to, the following: Please inquire about composition, impurity and other requirements.
- Metal Oxides (Al2O3, SiO2, ZnO, TiO2)
- Metal Nitrides (AlN, SiN, TiN, GaN)
- Carbon Films (CNT, Graphene)
If you have a request, please contact us

Anneal Substrate Surfaces and Films on Substrates

1. Choose from diverse range of substrate materials
- Silicon wafers、glass and other ceramic materials,
plastic substrates and films - Scan speed: 0.5 mm/s ~

2. Can handle demonstration substrate size up to 5cm x 5cm

3. HB gas temperature can be set in the 100 ~ 900 ℃ range

4. Chose from gas types : nitrogen, air, water, others
If you have a request, please contact us

Heating by HB Superheated steam enables

- Reforming Organic Materials
- Oxygen-free Drying and Sterilization
- Hydrogen Formation for Biomass Power Generation and Fuel Cell

1. Reforming materials
Woody and other biomass materials, methane and other hydrocarbon gas, meat
2. Superheated Steam Temperature can be in the 100~900℃ range. Flow rate of 70SLM is standard. Flow rate can be increased with dependency on temperature
3. Analysis Gas chromatography equipment is available to analyze on-site
4. Past Demonstration Examples:
- formation of hydrogen by applying superheated steam to methane - Oxygen-free steaming of meets to reform to be ultimately tender
If you have a request, please contact us