We exhibited at SEMICON Japan 2015, displaying panels and wafers of TSV Charge-Up Monitor Wafers (TSV wafer, Charge-up monitor wafer). (December 16-18, 2015)

We exhibited at SEMICON Japan 2015, displaying panels and wafers of TSV Charge-Up Monitor Wafers（TSV wafer, Charge-up monitor wafer）. Additionally, we exhibited an actual Heat Beam Cylinder and displayed a panel demonstrating our capability to grow Al2O3 at room temperature. The booth saw a high concentration of visitors, leading to times when there were not enough staff to accommodate all inquiries, highlighting the event's success.