We will select the appropriate processing company for your s. application from among our partner manufacturers around the world, including device lines and specialized film-forming manufacturers, and perform the film-forming process.
Blanket Film Wafers
Blanket Film Wafers
We provide film processing and film-formed wafers using various materials and manufacturing methods such as semiconductor films, insulating films, and metal film
We may also be able to accommodate film types other than those listed below, so please let us know your preferences for wafer size, film type, film thickness, etc..
| Classification | Film | Deposition Method |
|---|---|---|
| Oxide | Th-SiO2 | Thermal |
| P-SiO | PECVD | |
| ALD-SiO | ALD | |
| P-TEOS | PECVD | |
| LP-TEOS | LPCVD | |
| HDP | PECVD | |
| USG | PECVD | |
| PSG | CVD | |
| BPSG | CVD | |
| Silicon | Poly-Si | LPCVD |
| α-Si | PECVD | |
| Nitride | LP-SiN | LPCVD |
| P-SiN | PECVD | |
| Carbon | α-C | PECVD |
| SoC | Coating | |
| Photo Resist | I-Line | Coating |
| KrF | Coating | |
| ArF | Coating | |
| Low-K (SiOC) | BD | CVD |
| AURORA | CVD | |
| CORAL | CVD | |
| Metal | Ta,TaN | Sputter |
| Ti,TiN | Sputter | |
| W,WN | Sputter, CVD | |
| Cr | Sputter | |
| Cu | Sputter, EP | |
| Al,Al-Cu,Al-Si | Sputter | |
| Pt | Sputter | |
| Ni | Sputter | |
| Ru | Sputter, CVD, ALD | |
| Au | Sputter | |
| Mo, MoSi2, Mo2N,MoO | Sputter | |
| Co | Sputter, CVD, ALD | |
| SiGe, SiC, SiCN | Sputter, CVD | |
| HfO2 | Sputter, ALD | |
| ZrO2 | Sputter, ALD | |
| AL2O3 | Sputter, ALD |