Specialty Substrate Processing
Philtech provides pattern formation and microfabrication on specialty substrates such as glass and quartz. This article presents metal pattern formation and direct machining of quartz substrates.
The structures shown are a selection of processing examples. Other shapes and processing requirements can also be discussed.
Specialty substrates include glass, quartz, and other materials selected for the application. Transparent substrates that transmit visible light can be used for optical observation and pattern-recognition testing. Quartz glass offers optical transmission and low thermal expansion and is also used in optical equipment.
Substrate microfabrication can involve patterning a metal film on the surface or forming relief features directly in the substrate. Materials and processes are selected according to the purpose, such as combining transparent areas with metal patterns or forming trenches and steps in the substrate.
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Contact UsMetal Pattern Formation on Glass Substrates
This example shows a Cr (chromium) metal pattern formed on a 300mm glass substrate. It is used for testing with a substrate that transmits visible light.
Example Cr Pattern on a Glass Substrate
Direct Machining of Quartz Substrates
This is an example of direct machining of a 200mm quartz substrate. Patterns formed directly in the visible-light-transmitting quartz substrate are used for applications such as pattern-recognition testing.
The cross-sectional SEM image below shows an L&S pattern with a depth of 100nm. Fine relief features consisting of repeating lines and spaces are formed directly in the quartz substrate.
Directly Machined Quartz Substrate Example
