It is possible to form patterns using substrates made of materials different from silicon substrates.
Examples include forming metal patterns on glass substrates and quartz substrates, and directly processing quartz substrates.
Special Substrate Processing Wafers
Special Substrate Processing Wafers
1. Metal Pattern Formation on Glass Substrates
Cr pattern on glass substrate
(on microscope stage)
Glass substrate stored in a wafer case
This is an example of forming a metal pattern using Cr on a 300mm glass substrate.
Used for evaluation using a substrate that transmits visible light.
2. Direct Processing on Quartz Substrate
This is an example of direct processing of a 200mm quartz substrate.
Because it transmits visible light, it is used for pattern recognition evaluation, etc.
Cross-sectional SEM image
Example of directly processing a quartz substrate
(100nm deep L&S pattern)