・Purpose of use
・Size
・Structure, etc.
Test Wafers
We provide wafers from small to large diameters.
Please feel free to inquire about materials other than Si substrates.
Test wafers, also known as TEG wafers or dummy wafers, are wafers used for the development and evaluation of equipment and materials.
At Philtech, we offer a wide range of test wafers, from bare wafers to highly processed patterned wafers.
Even if it is not listed in the table below, we can still accommodate your needs, so please feel free to contact us for further information.
Workflow for Test Wafers
Inquiry
Consultation
・Detailed discussions via web conference
・Determination of patterns
Quotation to Order
・Estimation of cost/delivery time
Manufacturing
・Data Creation
・Mask manufacturing
・Wafer manufacturing
Delivery
・Shipment method
・Delivery items
Type list
Bare Wafers
We offer silicon wafers of various specifications and grades, as well as other special wafers such as SiC and SOI.
Blanket Film Wafers
We provide film processing and film-formed wafers using various materials and manufacturing methods such as semiconductor films, insulating films, and metal films.
Charge-Up Monitor Wafers
It is used for evaluating charge-up damage in plasma processing equipment.
Custom Design Pattern Wafers
We undertake the design and creation of mask data for customer-specific patterns, leading to the completion of wafers.
Trench Pattern Wafers
It is used for coverage evaluation of film formation equipment, etc.
Hole Pattern Wafers
It is used for evaluating coverage in film deposition equipment, embedding evaluation for plating, and performance evaluation for inspection equipment.
Poly Si Pattern Wafers
The wafer is formed by depositing PolySi on insulating films such as thermal oxide films and patterning them. It is used as a calibration wafer for dimensional and positional coordinates of the pattern.
SADP 25nm Line & Space Pattern Wafers
The L/S pattern fabricated using the SADP process. It is used for evaluating dry etching and coverage of film deposition equipment.
CMP Evaluation Wafers
Cu_CMP, STI_CMP, etc. CMP evaluation wafers are used for CMP equipment evaluation and slurry evaluation.
Implementation Evaluation Wafers
We also offer various specifications and grades of silicon wafers, as well as special wafers such as SiC and SOI.
Special Substrate Processing Wafers
Equipment for evaluating transparent substrates is used for evaluating substrates requiring insulation characteristics.
MEMS Processing Wafers
We undertake processing requests for silicon ranging from a few micrometers to several hundred micrometers using MEMS technology.
