Application Examples (Compact High-Efficiency Heat Exchangers)
																	Growing alumina (Al2O3) film in minute holes at room temperature
Compact High-Efficiency
Heat Exchangers
Apr 2, 2024
Aluminum chloride AlCl3 is the raw material for dimeric molecules. Water is also a macromolecular source of polymers. It is difficult for a room temperature reaction to occur as is, but if you heat it with a Heat Beam Cylinder and introduce it as a monomer, it will react. This is an application that grows aluminum oxide at room temperature.
HB-CVD experimental setup for growing alumina (Al2O3) films at room temperature
 
																							Overview of Al2O3 growth system
 
																							Aluminum oxide(Al2O3)
 
																							 
																							Alumina (Al2O3) is grown at room temperature on the inner wall of PET bottles.
 
																							New Articles
- Hydrogen gas station:H2 generator from Bio-CH4 and water (H2O)- Compact High-Efficiency 
 Heat Exchangers 
- Preventing clogging of exhaust pipes in semiconductor factories- Compact High-Efficiency 
 Heat Exchangers 
- Biomass gas generation from chicken manure- Compact High-Efficiency 
 Heat Exchangers 
- Example) ALD film conformality evaluation- Test Wafers 