Evaluation Examples/Application Examples

Examples of evaluation of “test wafers”
Application examples of compact high-efficiency heat exchangers (Heat Beam Cylinder®) are posted.

Growing alumina (Al2O3) film in minute holes at room temperature

Apr 2, 2024

Compact High-Efficiency
Heat Exchangers

Aluminum chloride AlCl3 is the raw material for dimeric molecules. Water is also a macromolecular source of polymers. It is difficult for a room temperature reaction to occur as is, but if you heat it with a Heat Beam Cylinder and introduce it as a monomer, it will react. This is an application that grows aluminum oxide at room temperature.

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Hydrogen gas station:H2 generator from Bio-CH4 and water (H2O)

Mar 18, 2024

Compact High-Efficiency
Heat Exchangers

Technologies have been established for producing biomethane and generating hydrogen. Heat-Beam-Cylinder is useful for inexpensive system design to generate hydrogen without using expensive platinum catalyst.

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Preventing clogging of exhaust pipes in semiconductor factories

Feb 20, 2024

Compact High-Efficiency
Heat Exchangers

CVD and etching equipment have problem of exhaust-pipe clogging due to byproduct, reducing up-time and damaging factory production/profit. This is an application example that solves that problem.

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Biomass gas generation from chicken manure

Feb 19, 2024

Compact High-Efficiency
Heat Exchangers

Cow manure, chicken manure, and fish scraps are waste materials that can be used as resources. Every country has trouble about dealing with it. This is an application example that can solve that problem. This is a large-market application.

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Example) ALD film conformality evaluation

Feb 16, 2024

Test Wafers

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Example) Coverage evaluation of PVD-Cu film

Feb 16, 2024

Test Wafers

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