Evaluation Examples (Test Wafers)

Example) Foundry

Test Wafers

Feb 16, 2024

Pattern formation on quartz substrate

At our company, we can directly form patterns not only on Si substrates but also on quartz substrates.
In the example below, resist was applied and developed directly onto a quartz wafer, patterned, and etched.

  • Quartz substrate
  • Resist coating
  • I-line stepper exposure/development
  • Quartz etching
  • Resist removal (ashing)

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